Output details
12 - Aeronautical, Mechanical, Chemical and Manufacturing Engineering
Newcastle University
Article title
Experimental investigation of parametric and externally forced motion in resonant MEMS sensors
Type
D - Journal article
Title of journal
Journal of Micromechanics and Microengineering
Article number
015021
Volume number
19
Issue number
1
First page of article
-
ISSN of journal
1361-6439
Year of publication
2009
Number of additional authors
3
Additional information
The research presented in this paper builds on work published by the group in 2008 [Burdess1] which identified the potential value of parametric excitation of MEMS in improving sensor sensitivity. This paper presents the first in depth experimental and theoretical study of parametric resonance and parametric amplification in electrostatic actuated MEMS, showing for the first time that the gain could be significantly increased (by an order of magnitude) with an appropriate parametric excitation scheme.
Interdisciplinary
Yes
Cross-referral requested
-
Research group
G - MEMS and Sensors
Proposed double-weighted
No
Double-weighted statement
-
Reserve for a double-weighted output
No
Non-English
No
English abstract
-
