Output details
12 - Aeronautical, Mechanical, Chemical and Manufacturing Engineering
Newcastle University
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Article title
Electrochemical Process for Micropattern Transfer Without Photolithography: A Modeling Analysis
Type
D - Journal article
Title of journal
Journal of The Electrochemical Society
Article number
-
Volume number
155
Issue number
2
First page of article
97
ISSN of journal
1945-7111
Year of publication
2008
Number of additional authors
1
Additional information
The process presented in this paper is a new method of microscale patterning which reduces the need for photolithography (the current platform technology) by over 95%. This is a new electrochemical method to manufacture micropatterns by plating or etching which has great potential in micro device and microfeature fabrication. The process has been patented in the US (Process for manufacturing micro-and nano-devices; US20080283501A1) and Japan (JP2008507630), and led in 2010 to the formation of a spin out company, Royenface, for its future commercial exploitation.
Interdisciplinary
-
Cross-referral requested
-
Research group
D - Electrochemical Engineering Science
Proposed double-weighted
No
Double-weighted statement
-
Reserve for a double-weighted output
No
Non-English
No
English abstract
-
