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13 - Electrical and Electronic Engineering, Metallurgy and Materials
Newcastle University
Experimental investigation of parametric and externally forced motion in resonant MEMS sensors
MEMS gyroscopes are widely used in consumer electronics, but lack the accuracy required for inertial navigation. This collaboration with Newcastle’s School of Mechanical & Systems Engineering is funded by industry and EPSRC (EP/G029296 £143,145). The paper presents results from a parametrically excited MEMS sensor capable of achieving extremely high mechanical quality factor and hence accuracy. To maintain stability and maximise SNR on the sensing channels, sophisticated DSP based control and detection techniques are introduced which are now a key enabler for ongoing research in the area. Such designs deliver cost effective gyroscopes with performance approaching that required for inertial navigation.
