Output details
13 - Electrical and Electronic Engineering, Metallurgy and Materials
University of Greenwich
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Article title
Silicon comb-drive actuators for low-temperature tuning of superconducting microwave circuits
Type
D - Journal article
Title of journal
Journal of Micromechanics and Microengineering
Article number
125003
Volume number
18
Issue number
12
First page of article
-
ISSN of journal
0960-1317
Year of publication
2008
Number of additional authors
3
Additional information
This work was funded by EPSRC (GR/S60471/01) and some of the fabrication effort was supported by FP 6-‘Research Infrastructures Action’. This was the first time that silicon MEMS actuator had been shown to have application in tuning superconducting microwave circuits. This constituted a novel technological achievement in the combination of these two technologies at cryogenic temperatures. One following-up work was published in the same journal and employed a different MEMS actuator, and the other one was featured by Electronics Letters in November 2010.
Interdisciplinary
-
Cross-referral requested
-
Research group
2 - Wireless and Mobile Communications Research Laboratory (WMCRL)
Proposed double-weighted
No
Double-weighted statement
-
Reserve for a double-weighted output
No
Non-English
No
English abstract
-
