Output details
13 - Electrical and Electronic Engineering, Metallurgy and Materials
University of the West of Scotland
Nanowire Lithography on Silicon
Nanowire lithography reported in this paper was highlighted in journal of “Science” as one of the promising future nano-technologies. Dr. Fu was further invited to publish a review paper on nano-patterning using deep-RIE in J. Vac. Sci. Technology (2009-27-1520). He has then given several invited talks in international Conferences (including Thin film 2010 in Singapore, 2011 Nanomanufacuring Conference in China). The work attracted collaborations worldwide (including Swansea University, STS Company, University of Electronic Science and Technology of China, Xian Jiaotong University, and Zhejiang University, China) for further development and potential commercialization of this technique for MEMS and Solar Cells.
