Output details
13 - Electrical and Electronic Engineering, Metallurgy and Materials
Glyndŵr University
Edges in CNC polishing: from mirror-segments towards semiconductors, paper 1: edges on processing the global surface
This research was part of a wider thrust supporting the world’s largest optical telescope project – the 39m European Extremely Large Telescope. The primary mirror will comprise 798 mirror segments each of 1.45 meters. The control of segment edge profiles is one of the key technical challenges, as rolled edges directly compromise signal-to-noise ratio on science objectives such as detecting extra-solar planets. This paper focusses on edge-metrology - a particular challenge as edge-defects are often invisible in interferometric testing. Edge-control is now finding application for polishing photomasks for semiconductor manufacture out to the extreme edge