Output details
12 - Aeronautical, Mechanical, Chemical and Manufacturing Engineering
Cranfield University
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Article title
Dynamic operational stress measurement of MEMS using time-resolved Raman spectroscopy
Type
D - Journal article
Title of journal
Journal of Microelectromechanical Systems
Article number
-
Volume number
17
Issue number
6
First page of article
1315
ISSN of journal
1057-7157
Year of publication
2008
URL
-
Number of additional authors
5
Additional information
Investigation of induced stress both from a passive and active film has enabled us to develop new techniques to minimize/utilize this stress in the development of novel MEMS devices. The techniques developed are being used in a confidential industrial project with Matthews international, an American multinational, and ImTech technologies LLC (contact bill.buskirk@imtech-or.com) which has been running over 4 years at Cranfield University.
Interdisciplinary
-
Cross-referral requested
-
Research group
D - Manufacturing & Materials
Proposed double-weighted
No
Double-weighted statement
-
Reserve for a double-weighted output
No
Non-English
No
English abstract
-
