Output details
12 - Aeronautical, Mechanical, Chemical and Manufacturing Engineering
Newcastle University
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Article title
The fabrication, characterization and testing of a MEMS circular diaphragm mass sensor
Type
D - Journal article
Title of journal
Journal of Micromechanics and Microengineering
Article number
025021
Volume number
18
Issue number
2
First page of article
-
ISSN of journal
0960-1317
Year of publication
2008
Number of additional authors
8
Additional information
This paper presents a novel MEMS based biosensor design which is inherently temperature compensating, improving over alternative designs which must be explicitly compensated for temperature. The sensor was manufactured and characterised to demonstrate temperature insensitivity and provide proof of concept. The research was used as a key part of the case for support of the EC SmartHEALTH project (Smart Integrated Biodiagnostic Systems for Healthcare; 016817).
Interdisciplinary
-
Cross-referral requested
-
Research group
G - MEMS and Sensors
Proposed double-weighted
No
Double-weighted statement
-
Reserve for a double-weighted output
No
Non-English
No
English abstract
-
