Output details
15 - General Engineering
University of Huddersfield
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Article title
In-Process Fast Surface Measurement Using Wavelength Scanning Interferometry
Type
D - Journal article
Title of journal
Advanced Materials Research
Article number
-
Volume number
622-62
Issue number
-
First page of article
357
ISSN of journal
1662-8985
Year of publication
2012
Number of additional authors
2
Additional information
This paper is the conclusion of a four years EPSRC research, EPE0237111-UPS2-03 (PI X. Jiang) project in the field of in-process surface measurement using wavelength scanning interferometry. It has become a part of fundamental impact element of the FP7 project NanoMend NMP4-LA-2011-280518(PI L Blunt) where the technique is being commercialised. In this paper a wavelength scanning interferometry system for fast areal surface measurement of micro and nano-scale surfaces, immune to environmental noise is introduced. It can be used for surface measurement of discontinuous surface profiles by producing phase shifts without any mechanical scanning process.
Interdisciplinary
-
Cross-referral requested
-
Research group
None
Proposed double-weighted
No
Double-weighted statement
-
Reserve for a double-weighted output
No
Non-English
No
English abstract
-
