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Online Testing of MEMS Based on Encoded Stimulus Superposition.

Reports on a novel Built-in Self-Test for MEMS involving the injection of an encoded bit stream into the bias structure of a MEMS device capable of generating a response that is decoupled from normal use perturbations. Co-authored by researchers in CNRS, Montpellier, and QinetiQ, UK. The test method reported was invented at Lancaster with simulation support from CNRS and assistance with practical demonstration on a commercial accelerometer by QinetiQ. Represents state-of-the-art in MEMS test. Competing works are from Mir (CNRS, Grenoble) and Blanton (Carnegie Mellon) with solutions that do not exceed the capability of this method nor its online applicability.