Output details
12 - Aeronautical, Mechanical, Chemical and Manufacturing Engineering
Newcastle University
Article title
Dynamic characterization of MEMS using Raman spectroscopy
Type
D - Journal article
Title of journal
Journal of Micromechanics and Microengineering
Article number
095019
Volume number
18
Issue number
9
First page of article
-
ISSN of journal
1361-6439
Year of publication
2008
Number of additional authors
3
Additional information
This paper presents a novel approach to characterising the motion of Raman active micro and nano mechanical vibratory structures, which, uniquely, has the capability of characterising in-plane motion without the requirement to map surface features. The work was performed as part of EPSRC project “Development of a Dynamic Micro Analysis Raman Spectroscopy (DyMARS) System for characterisation of MEMS and NEMS” (EP/C015045/1), and has led directly to further EPSRC support for the purchase of an ultra-high frequency laser vibrometer (two linked awards: EP/K022679/1 and EP/L001268/1), in order to continue to develop processes for leading edge MEMS and NEMS characterisation.
Interdisciplinary
-
Cross-referral requested
-
Research group
G - MEMS and Sensors
Proposed double-weighted
No
Double-weighted statement
-
Reserve for a double-weighted output
No
Non-English
No
English abstract
-
