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Deformation of Si(100) in spherical contacts - Comparison of nano-fretting and nano-scratch tests with nano-indentation

Fundamental work providing increased understanding of mechanical behavior of silicon under complex loading geometries. Results are significant for the design of thin films on silicon for MEMS technology and simulations of ductile-regime machining of silicon. Led to follow-on research and ongoing collaboration with MicroMaterials – leading international manufacturer of innovative nanomechanical equipment. Led to development of a new product offered commercially by the company – currently used by research groups at MIT and nCAST (Southampton). Validation contact Ben Beake, ben@micromaterials.co.uk. Work resulted in follow-on funding from the Welsh Assembly Government Fund for the company (£342,421 in total, ref. A-ID009-13-qA767591 and A-ID009-13-qA870489).