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Output details

9 - Physics

Output 24 of 42 in the submission

Article title

Medium energy ion scattering analysis of the evolution and annealing of damage and associated dopant redistribution of ultra shallow implants in Si

Type

D - Journal article

DOI

Title of journal

Radiation Effects and Defects in Solids

Article number

Volume number

164

Issue number

7-8

First page of article

481

ISSN of journal

1042-0150

Year of publication

2009

URL

Number of additional authors

Additional information

Interdisciplinary

Cross-referral requested

Research group

B - The Condensed Matter and Materials Physics Group

Citation count

Proposed double-weighted

Double-weighted statement

Reserve for a double-weighted output

Non-English

English abstract