Output details
9 - Physics
University of Huddersfield
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Output 0 of 0 in the submission
Article title
Medium energy ion scattering analysis of the evolution and annealing of damage and associated dopant redistribution of ultra shallow implants in Si
Type
D - Journal article
Title of journal
Radiation Effects and Defects in Solids
Article number
-
Volume number
164
Issue number
7-8
First page of article
481
ISSN of journal
1042-0150
Year of publication
2009
Number of additional authors
6
Additional information
-
Interdisciplinary
-
Cross-referral requested
-
Research group
B - The Condensed Matter and Materials Physics Group
Citation count
2
Proposed double-weighted
No
Double-weighted statement
-
Reserve for a double-weighted output
No
Non-English
No
English abstract
-