Output details
9 - Physics
Heriot-Watt University
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Output 0 of 0 in the submission
Article title
70 nm resolution in subsurface optical imaging of silicon integrated-circuits using pupil-function engineering
Type
D - Journal article
Title of journal
Applied Physics Letters
Article number
073113
Volume number
94
Issue number
7
First page of article
-
ISSN of journal
0003-6951
Year of publication
2009
URL
-
Number of additional authors
2
Additional information
-
Interdisciplinary
-
Cross-referral requested
-
Research group
None
Citation count
11
Proposed double-weighted
No
Double-weighted statement
-
Reserve for a double-weighted output
No
Non-English
No
English abstract
-